Beilstein J. Nanotechnol.2017,8, 682–687, doi:10.3762/bjnano.8.73
source. Our method of profiling ion beams with 2D-layer perforation provides more information on ion beam profiles than the conventional sharp-edge scan method does.
Keywords: exposure dose; focused ion beam; freestanding2Dlayer; graphene; ion beam diameter; ion beam point spread function
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Figure 1:
(a) STEM-BF image of a graphene membrane perforated with a 1.5 pA Ga-FIB. Pores diameter increases ...